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Capacitive displacement sensors at a glance
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Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylindrical design (with integrated cable or socket) or as flat sensors (with integrated cable). The displacement sensors can be exchanged without recalibration; the sensor replacement can be completed rapidly. The majority of sensors can be used in clean rooms; use in ultra high vacuums is also possible.
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Cylindrical sensors with female connector
Model |
Measuring range |
Min. ø Target |
Dimension |
CS005 |
0,05 mm |
3 mm |
Ø6 × 12 mm |
CS02 |
0,2 mm |
5 mm |
Ø6 × 12 mm |
CS05 |
0,5 mm |
7 mm |
Ø8 × 12 mm |
CSE05 |
0,5 mm |
6 mm |
Ø6 × 12 mm |
CS08 |
0,8 mm |
9 mm |
Ø10 × 15 mm |
CS1 |
1 mm |
9 mm |
Ø10 × 21 mm |
CS1HP |
1 mm |
9 mm |
Ø10 × 20 mm |
CSE1 |
1 mm |
8 mm |
Ø8 × 12 mm |
CS2 |
2 mm |
17 mm |
Ø20 × 24 mm |
CSE2 |
2 mm |
14 mm |
Ø14 × 22 mm |
CS3 |
3 mm |
27 mm |
Ø30 × 24 mm |
CS5 |
5 mm |
37 mm |
Ø40 × 24 mm |
CS10 |
10 mm |
57 mm |
Ø60 × 24 mm |
CS = capa Sensor
HP = High Precision
CSE05
Weight: |
2 g |
Resolution: |
0,375 nm * |
Linearity: |
0,15 µm * |
Temperature stability sensitivity: |
-5 nm/°C |
Operation temperature max.: |
+200 °C |
* depends on controller unit
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Cylindrical sensors with integrated cable
Model |
Measuring range |
Min. ø Target |
Dimension |
CSH02-CAm1,4 |
0,2 mm |
7 mm |
Ø8 × 14 mm |
CSH05-CAm1,4 |
0,5 mm |
7 mm |
Ø8 × 14 mm |
CSH1-CAm1,4 |
1 mm |
11 mm |
Ø12 × 14 mm |
CSH1,2-CAm1,4 |
1,2 mm |
11 mm |
Ø12 × 14 mm |
CSH2-CAm1,4 |
2 mm |
17 mm |
Ø20 × 14 mm |
CSH = capa Sensor Hybrid
CSH1,2-CAm1,4
Weight: |
33 g |
Resolution: |
0,9 nm * |
Linearity: |
0,84 µm * |
Temperature stability sensitivity: |
-14,4 nm/°C |
Operation temperature max.: |
+200 °C |
Cable length: |
1,4 m |
* depends on controller unit
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Flat sensors with integrated cable
Model |
Measuring range |
Min. ø Target |
Dimension |
CSH02FL-CRm1,4 |
0,2 mm |
7 mm |
10,5 × 8 × 4 mm |
CSH05FL-CRm1,4 |
0,5 mm |
7 mm |
10,5 × 8 × 4 mm |
CSH1FL-CRm1,4 |
1 mm |
11 mm |
17 × 12 × 4 mm |
CSH1,2FL-CRm1,4 |
1,2 mm |
11 mm |
17 × 12 × 4 mm |
CSH2FL-CRm1,4 |
2 mm |
17 mm |
20 × 20 × 5 mm |
CSH = capa Sensor Hybrid
FL = Flat Design
CSH1FL-CRm1,4
Weight: |
30 g |
Resolution: |
0,75 nm * |
Linearity: |
0,2 µm * |
Temperature stability sensitivity: |
-12 nm/°C |
Operation temperature max.: |
+200 °C |
Cable length: |
1,4 m |
* depends on controller unit
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Capacitive gap sensors
Model |
Measuring range |
Min. ø Target |
Dimension |
CSG0,50-CAm2,0 |
0,9 - 1,9 |
7x8 mm |
200x15x0,9 |
CSG1,0-CAm2,0 |
0,9 - 2,9 mm |
8x9 mm |
200x15x0,9 |
CSG = capa Sensor Gap
CSG1,0-CAm2,0
Weight: |
77 g |
Resolution: |
8 nm * |
Linearity: |
1 µm * |
* depends on controller unit
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