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Confocal sensors for displacement, position, thickness

    Measuring ranges Resolution Linearity
confocal-chromatic-sensor--IFS-2405--34px.jpg (2 KB)) Confocal sensors for displacement, position, thickness 0.3 - 30 mm 0.0006 % F.S.O. ± 0.025 % F.S.O.
FSO = of full scale output
 

Details

Measuring ranges (mm):
0.300 | 1 | 3 | 10 | 28 | 30
Linearity max. 0.3 µm
Resolution max. 0.01 µm
Extremely small and constant spot size
High precision measurement, also for mirrors and glass
Nanoresolution
One-sided thickness-measurement
 
 

 


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