Capacitive displacement sensors at a glance

Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylindrical design (with integrated cable or socket) or as flat sensors (with integrated cable). The displacement sensors can be exchanged without recalibration; the sensor replacement can be completed rapidly. The majority of sensors can be used in clean rooms; use in ultra high vacuums is also possible.

Cylindrical sensors with female connector

Model	Measuring range	Min. ø Target	Dimension
CS005	0,05 mm	3 mm	Ø6 × 12 mm
CS02	0,2 mm	5 mm	Ø6 × 12 mm
CS05	0,5 mm	7 mm	Ø8 × 12 mm
CSE05	0,5 mm	6 mm	Ø6 × 12 mm
CS08	0,8 mm	9 mm	Ø10 × 15 mm
CS1	1 mm	9 mm	Ø10 × 21 mm
CS1HP	1 mm	9 mm	Ø10 × 20 mm
CSE1	1 mm	8 mm	Ø8 × 12 mm
CS2	2 mm	17 mm	Ø20 × 24 mm
CSE2	2 mm	14 mm	Ø14 × 22 mm
CS3	3 mm	27 mm	Ø30 × 24 mm
CS5	5 mm	37 mm	Ø40 × 24 mm
CS10	10 mm	57 mm	Ø60 × 24 mm

CS = capa Sensor
HP = High Precision

CSE05

Weight:	2 g
Resolution:	0,375 nm *
Linearity:	0,15 µm *
Temperature stability sensitivity:	-5 nm/°C
Operation temperature max.:	+200 °C

* depends on controller unit

Cylindrical sensors with integrated cable

Model	Measuring range	Min. ø Target	Dimension
CSH02-CAm1,4	0,2 mm	7 mm	Ø8 × 14 mm
CSH05-CAm1,4	0,5 mm	7 mm	Ø8 × 14 mm
CSH1-CAm1,4	1 mm	11 mm	Ø12 × 14 mm
CSH1,2-CAm1,4	1,2 mm	11 mm	Ø12 × 14 mm
CSH2-CAm1,4	2 mm	17 mm	Ø20 × 14 mm

CSH = capa Sensor Hybrid

CSH1,2-CAm1,4

Weight:	33 g
Resolution:	0,9 nm *
Linearity:	0,84 µm *
Temperature stability sensitivity:	-14,4 nm/°C
Operation temperature max.:	+200 °C
Cable length:	1,4 m

* depends on controller unit

Flat sensors with integrated cable

Model	Measuring range	Min. ø Target	Dimension
CSH02FL-CRm1,4	0,2 mm	7 mm	10,5 × 8 × 4 mm
CSH05FL-CRm1,4	0,5 mm	7 mm	10,5 × 8 × 4 mm
CSH1FL-CRm1,4	1 mm	11 mm	17 × 12 × 4 mm
CSH1,2FL-CRm1,4	1,2 mm	11 mm	17 × 12 × 4 mm
CSH2FL-CRm1,4	2 mm	17 mm	20 × 20 × 5 mm