Capacitive multi-channel system for maximum resolution Product Technology

Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometer resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analog output, an EtherCAT(R) interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronization of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser.

Catalog capaNCDT sensors

Data sheet capaNCDT 6500

Characteristics

Measuring ranges (mm): 0.05 | 0.2 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10
Resolution max. 0.0375nm
Linearity max. 0.01µm
Frequency response 8.5kHz (-3dB)
Data rate (digital output) 7.8kHz
Analog output (voltage/current)
Ethernet, EtherCAT
Modular – up to 8 channels
External or internal preamplifier
User-friendly set up and configuration via web interface

Maximum resolution

The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometer resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. The modular capaNCDT 6500 is designed for multi-channel applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics.

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearization.

Capacitive controller with sub-nanometer resolution – capaNCDT 6530 controller

The capacitive DT6530 controller offers maximum resolution and signal stability for capacitive displacement measurement. The controller can be operated with up to 8 channels and is not only suitable for electrically conductive objects, but also for insulators. In addition to analog outputs, the controller is also equipped with an Ethernet digital interface. The DT6530 controller is compatible with all sensors and cables of the capaNCDT series.

Characteristics

Resolution dynamic 0.002 % FSO (8.5kHz)
Frequency response 8.5kHz (-3 dB) (switchable 20Hz; 1kHz;
8.5kHz)
Analog output 0...10V (short circuit proof), 4...20mA; 0...20mA
Digital interface Ethernet 24 Bit; EtherCAT
Special tuning: up to quadruple standard cable length

Data sheet capaNCDT 6500

New: Mounting frame for two-sided thickness measurements MA-CS-3 / MA-CS-2-C

The DT6222 capacitive controller is used for dynamic, capacitive measurement tasks. A frequency response of up to 20kHz (-3dB) enables reliable monitoring of fast processes. As well as analog outputs, the controller is also equipped with a digital Ethernet interface. The DT6222 controller is compatible with all sensors and cables of the capaNCDT series.

Characteristics