
For air gap measurement between two glass plates (n~1), the measuring range is 1.5 µm ... 150 µm. For glass thickness measurement (with refractive index ~1.5), it is 1 µm to 100 µm.
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Reliable thickness measurement with varying measurement distances
The IMS5200-TH white light interferometer is used for high-precision thickness measurements. A decisive advantage here is the distance-independent measurement, where a nanometer-accurate thickness value is achieved even with moving objects. The measuring range of 1 to 100 µm enables the measurement of thin transparent layers and films.
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