Capacitive displacement sensors at a glance
 

Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylindrical design (with integrated cable or socket) or as flat sensors (with integrated cable). The displacement sensors can be exchanged without recalibration; the sensor replacement can be completed rapidly. The majority of sensors can be used in clean rooms; use in ultra high vacuums is also possible.
Cylindrical sensors with female connector
Model Measuring range Min. ø Target Dimension
CS005 0,05 mm 3 mm Ø6 × 12 mm
CS02 0,2 mm 5 mm Ø6 × 12 mm
CS05 0,5 mm 7 mm Ø8 × 12 mm
CSE05 0,5 mm 6 mm Ø6 × 12 mm
CS08 0,8 mm 9 mm Ø10 × 15 mm
CS1 1 mm 9 mm Ø10 × 21 mm
CS1HP 1 mm 9 mm Ø10 × 20 mm
CSE1 1 mm 8 mm Ø8 × 12 mm
CS2 2 mm 17 mm Ø20 × 24 mm
CSE2 2 mm 14 mm Ø14 × 22 mm
CS3 3 mm 27 mm Ø30 × 24 mm
CS5 5 mm 37 mm Ø40 × 24 mm
CS10 10 mm 57 mm Ø60 × 24 mm
CS = capa Sensor
HP = High Precision

CSE05

CAD Ansicht
Weight: 2 g
Resolution: 0,375 nm *
Linearity: 0,15 µm *
Temperature stability sensitivity: -5 nm/°C
Operation temperature max.: +200 °C
* depends on controller unit
 
Cylindrical sensors with integrated cable
Model Measuring range Min. ø Target Dimension
CSH02-CAm1,4 0,2 mm 7 mm Ø8 × 14 mm
CSH05-CAm1,4 0,5 mm 7 mm Ø8 × 14 mm
CSH1-CAm1,4 1 mm 11 mm Ø12 × 14 mm
CSH1,2-CAm1,4 1,2 mm 11 mm Ø12 × 14 mm
CSH2-CAm1,4 2 mm 17 mm Ø20 × 14 mm
CSH = capa Sensor Hybrid

CSH1,2-CAm1,4

CAD Ansicht
Weight: 33 g
Resolution: 0,9 nm *
Linearity: 0,84 µm *
Temperature stability sensitivity: -14,4 nm/°C
Operation temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
Flat sensors with integrated cable
Model Measuring range Min. ø Target Dimension
CSH02FL-CRm1,4 0,2 mm 7 mm 10,5 × 8 × 4 mm
CSH05FL-CRm1,4 0,5 mm 7 mm 10,5 × 8 × 4 mm
CSH1FL-CRm1,4 1 mm 11 mm 17 × 12 × 4 mm
CSH1,2FL-CRm1,4 1,2 mm 11 mm 17 × 12 × 4 mm
CSH2FL-CRm1,4 2 mm 17 mm 20 × 20 × 5 mm
CSH = capa Sensor Hybrid 
FL = Flat Design

CSH1FL-CRm1,4

CAD Ansicht
Weight: 30 g
Resolution: 0,75 nm *
Linearity: 0,2 µm *
Temperature stability sensitivity: -12 nm/°C
Operation temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
Capacitive gap sensors
Model Measuring range Min. ø Target Dimension
CSG0,50-CAm2,0 0,9 - 1,9 7x8 mm 200x15x0,9
CSG1,0-CAm2,0 0,9 - 2,9 mm 8x9 mm 200x15x0,9
CSG = capa Sensor Gap

CSG1,0-CAm2,0

CAD Ansicht
Weight: 77 g
Resolution: 8 nm *
Linearity: 1 µm *
* depends on controller unit