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White light interferometer for absolute distance measurement with nanometer accuracy Product Technology

The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.

Data sheet interferoMETER IMS5400DS

Characteristics

Nanometer-precise distance measurements
Absolute measurement, suitable for step profiles
Compact and robust sensors with large offset distance
Measuring rate up to 6 kHz for high speed measurements
Ethernet, EtherCAT, RS422
Robust controller with passive cooling
Easy configuration via web interface

Absolute distance measurement with nanometer resolution

The IMS5400-DS is used for high-precision displacement and distance measurements. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.

Ideal for industrial environments

Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and can also be integrated in confined spaces. Highly flexible fiber optic cables are available in lengths up to 10 m and allow a spatial separation of sensor and controller. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.

Small light spot for the smallest of details and structures

The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturized electronic components.

Measuring multiple surfaces

The interferometric measuring method enables measurements on numerous surfaces. This allows high-precision distance measurements on reflecting metals, plastics and glass.