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    Confocal sensors for displacement, position, thickness

        Measuring ranges Resolution Linearity
    confocal-chromatic-sensor--IFS-2405--34px.jpg (2 KB)) Confocal sensors for displacement, position, thickness 0.3 - 30 mm 0.0006 % F.S.O. ± 0.025 % F.S.O.
    FSO = of full scale output
     

    Details

    Measuring ranges (mm):
    0.300 | 1 | 3 | 10 | 28 | 30
    Linearity max. 0.3 µm
    Resolution max. 0.01 µm
    Extremely small and constant spot size
    High precision measurement, also for mirrors and glass
    Nanoresolution
    One-sided thickness-measurement