Capacitive single channel system for dynamic measurements
 
The capacitive sensor system capaNCDT 6350 is designed for industrial use in production plants, for measuring and testing during in-process quality assurance. The capacitive measuring principle ensures very stable and very accurate measuring results.
 

 Characteristics

  •  Measuring ranges (mm): 0.2 | 0.5 | 1 | 2 | 3 | 5 | 10
  •  Linearity max. 0.6µm
  •  Resolution max. 0.01µm
  •  High stability and accuracy
  •  Nanoresolution
  •  High functionality due to integrated DSP
  •  Bandwidth 50 kHz
  •  Wear-free and maintenance-free
  •  Linear characteristics
  •  Suitable for all electrically conductive materials
  •  High measuring rates
 
 

 

 

High resolution capacitive measurement system
 
The capacitive sensor system capaNCDT 6300/6310 is designed for industrial use in production plants, for measuring and testing during in-process quality assurance. The capacitive measuring principle ensures very stable and very accurate measuring results.
 

 Characteristics

  •  Measuring ranges (mm): 0.05 | 0.2 | 0.5 | 1 | 2 | 3 | 5 | 10
  •  Linearity max. 0.1µm
  •  Resolution max. 0.0005µm
  •  High stability and accuracy
  •  Wear-free and maintenance-free
  •  Linear characteristics
  •  Suitable for all electrically conductive materials
 
 

 

 

Compact capacitive single channel system for precisemeasurements
 
The capaNCDT 6100 is a capacitve sensor system for non-contact displacement and position measurement. Typical applications can be found in positioning, wear measurements, gap measurements, displacement, roundness and others.
 

 Characteristics

  •  Measuring ranges (mm): 0.2 | 0.5 | 1 | 2 | 3 | 5 | 10
  •  Linearity max. 0.2µm
  •  Resolution max. 0.03µm
  •  High stability and accuracy
  •  Wear-free and maintenance-free
  •  Linear characteristics
  •  Suitable for all electrically conductive materials
 
 

 

 

Capacitive single-channel system for OEM integration                                                             Product Technology
 
The capacitive displacement sensor system capaNCDT 6019 is developed for machine and facility integration. Typical applications for this miniaturised non-contact measuring system can be found in positioning, wear measurements, gap measurements, displacement, roundness and many more.
 
 

 Characteristics

  •  Measuring ranges (mm): 0.2 | 0.5 | 1 | 2 | 3 | 5 | 10
  •  Resolution max. 0.02µm
  •  Linearity max. 2µm
  •  Wear-free and maintenance-free
  •  Specially for OEM
  •  Miniaturized design
  •  Linear characteristics
  •  Low power consumption
  •  Suitable for all electrically conductive materials
 
 

 

 
 

Capacitive displacement sensors at a glance
 

Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylindrical design (with integrated cable or socket) or as flat sensors (with integrated cable). The displacement sensors can be exchanged without recalibration; the sensor replacement can be completed rapidly. The majority of sensors can be used in clean rooms; use in ultra high vacuums is also possible.
Cylindrical sensors with female connector
Model Measuring range Min. ø Target Dimension
CS005 0,05 mm 3 mm Ø6 × 12 mm
CS02 0,2 mm 5 mm Ø6 × 12 mm
CS05 0,5 mm 7 mm Ø8 × 12 mm
CSE05 0,5 mm 6 mm Ø6 × 12 mm
CS08 0,8 mm 9 mm Ø10 × 15 mm
CS1 1 mm 9 mm Ø10 × 21 mm
CS1HP 1 mm 9 mm Ø10 × 20 mm
CSE1 1 mm 8 mm Ø8 × 12 mm
CS2 2 mm 17 mm Ø20 × 24 mm
CSE2 2 mm 14 mm Ø14 × 22 mm
CS3 3 mm 27 mm Ø30 × 24 mm
CS5 5 mm 37 mm Ø40 × 24 mm
CS10 10 mm 57 mm Ø60 × 24 mm
CS = capa Sensor
HP = High Precision

CSE05

CAD Ansicht
Weight: 2 g
Resolution: 0,375 nm *
Linearity: 0,15 µm *
Temperature stability sensitivity: -5 nm/°C
Operation temperature max.: +200 °C
* depends on controller unit
 
Cylindrical sensors with integrated cable
Model Measuring range Min. ø Target Dimension
CSH02-CAm1,4 0,2 mm 7 mm Ø8 × 14 mm
CSH05-CAm1,4 0,5 mm 7 mm Ø8 × 14 mm
CSH1-CAm1,4 1 mm 11 mm Ø12 × 14 mm
CSH1,2-CAm1,4 1,2 mm 11 mm Ø12 × 14 mm
CSH2-CAm1,4 2 mm 17 mm Ø20 × 14 mm
CSH = capa Sensor Hybrid

CSH1,2-CAm1,4

CAD Ansicht
Weight: 33 g
Resolution: 0,9 nm *
Linearity: 0,84 µm *
Temperature stability sensitivity: -14,4 nm/°C
Operation temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
Flat sensors with integrated cable
Model Measuring range Min. ø Target Dimension
CSH02FL-CRm1,4 0,2 mm 7 mm 10,5 × 8 × 4 mm
CSH05FL-CRm1,4 0,5 mm 7 mm 10,5 × 8 × 4 mm
CSH1FL-CRm1,4 1 mm 11 mm 17 × 12 × 4 mm
CSH1,2FL-CRm1,4 1,2 mm 11 mm 17 × 12 × 4 mm
CSH2FL-CRm1,4 2 mm 17 mm 20 × 20 × 5 mm
CSH = capa Sensor Hybrid 
FL = Flat Design

CSH1FL-CRm1,4

CAD Ansicht
Weight: 30 g
Resolution: 0,75 nm *
Linearity: 0,2 µm *
Temperature stability sensitivity: -12 nm/°C
Operation temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
Capacitive gap sensors
Model Measuring range Min. ø Target Dimension
CSG0,50-CAm2,0 0,9 - 1,9 7x8 mm 200x15x0,9
CSG1,0-CAm2,0 0,9 - 2,9 mm 8x9 mm 200x15x0,9
CSG = capa Sensor Gap

CSG1,0-CAm2,0

CAD Ansicht
Weight: 77 g
Resolution: 8 nm *
Linearity: 1 µm *
* depends on controller unit
 
 

 

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  4. Micro-Epsilon | Custom Designed Sensors

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