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 Catalog eddyNCDT Sensors (PDF, 3.6 MB)               
 Data sheet eddyNCDT 3100 (Excerpt of Catalog)

Innovative eddy current measurement

 
    Measuring ranges Resolution Linearity
eddyNCDT-3100--35px.jpg (1 KB)) Innovative eddy current measurement 0.5 - 15 mm 0.005 % F.S.O. ± 0.25 % F.S.O.
FSO = of full scale output
 

Smart
The eddyNCDT 3100 represents the new generation of eddy current displacement sensors. The configuration of the measurement system is effected via a web interface which can be easily operated. Additional sensor are required. Since all characteristics are stored within the sensor, all eddy current displacement sensors of the series 3100 can be easily exchanged without requiring an additional calibration.

Performance
The eddy current displacement measurement system uses a patented temperature compensation method to provide first-class stability even in the case of fluctuating temperature. Due to the high resolution and linearity demanding measurement tasks can also be fulfilled. With a cut-off frequency of 25kHz (-3dB) the eddyNCDT 3100 can also be applied for fast measurements.

Universal
Both the controller and the sensors can be applied in harsh environments. Switching between ferromagnetic and non-ferromagnetic measurement objects can also be effected easily. For the measurement with different channels up to 10 controllers can be synchronized (eddyNCDT 3100-SM).

Details

Measuring ranges 0.5mm - 15mm
Sensor replacement without additional calibration
Factory calibrated sensors for ferromagnetic and non-ferromagnetic materials
Ultra-flexible cable
Pressure resistant sensors
Interfaces: Ethernet / 4 - 20mA / 0 - 10V
Configuration via web browser
 
 

 

DOWNLOADS

 Catalog eddyNCDT Sensors (PDF, 3.6 MB)               
 Data sheet eddyNCDT 3010 (Excerpt of Catalog)

Compact eddy current sensor system

 
    Measuring rangesHelpIcon ResolutionHelpIcon LinearityHelpIcon
eddy-3010.jpg (829 Bytes)) Compact eddy current sensor system 0.5 - 15 mm 0.005 % F.S.O. ± 0.25 % F.S.O.
FSO = of full scale output
 

Process controllers and interface cards

IF1032-ETH-35pxInterface module IF1032/ETH

The temperature range of the 3010 eddy current sensors ranges from -50 °C up to 150 °C. In the case of fluctuating ambient temperatures a stable output signal is very important for reliable measurements. Due to a patented temperature compensation method the eddyNCDT 3010 offers a unique thermal stability.

Details

Measuring ranges (mm):
0.5 | 1 | 2 | 3 | 6 | 15
Resolution max. 0.025 µm
Linearity max. 0.00125mm
Active temperature compensation
Extreme repeatability
Ideal for OEMs
High resolution
 
 

 

DOWNLOADS

 Catalog capaNCDT (PDF, 2.59 MB)               

Capacitive sensors with Embedded Capa Technology

Capacitive sensors with Embedded Capa Technology are manufactured using a revolutionary type of production process. The new technology is also used for eddy current sensors. This means a significantly increased service life for the capacitive sensors is possible. Due to the embedding of the electrode in a very stable carrier material, significantly improved temperature stability is achieved when compared to conventional sensors currently available on the market. The brand new sensors can also be used in temperatures up to 200°C; even very low temperatures down to -269°C can be achieved. ECT enables significantly more freedom of design for the capacitive sensors. For example, the capaNCDT CSH-FL sensors have an installation height of just 4mm.

Sensor models produced:

  • capaNCDT CSH
  • capaNCDT CSH-FL

Details

Best temperature stability
Application in clean room and ultra high vacuum
Special sensor designs
Operating temperature between -269°C to 200°C
Standardized production process

 

 
 

 

 

Capacitive sensors for specific applications

 
Application examples are often found where the standard versions of the sensors and the controller are performing at their limits. For these special tasks, the measurement systems can be modified according to the customer’s individual requirements. Changes requested include, for example, modified designs, target calibration, mounting options, individual cable lengths, modified measuring ranges or sensors with integrated controller.
 
Catalog capaNCDT sensors
 

 Characteristics

  •  Modified measuring ranges and cable lengths
  •  Special sensor designs: clean room-compatible, for extremely low temperatures (4°K), material option (Invar® or
  •     Titanium), with thread
  •  Sensors with integrated electronics
  •  Special coordination to your target
  •  Output options
 

Capacitive displacement sensors with Embedded Capa Technology (ECT)

Capacitive sensors with Embedded Capa Technology are designed using a innovative manufacturing technique, which provides the sensor with significantly higher long-term stability. The electrode is embedded in an extremely stable carrier material that provides significantly higher temperature stability compared to conventional sensor designs. This new technology enables different sensor designs in a temperature range from -270°C to +200°C.

Capacitive sensors for magnetic fields, very low temperatures (cryogenics) and vacuum

   
Capacitive sensors from Micro-Epsilon are often used in vacuum and clean room applications where they achieve resolutions in the nanometer range. Sensors, cables and feed-through are particle-free to a high degree and used in clean room class 1.  

For environments with strong magnetic fields, Micro-Epsilon offers sensors and cables which are made from non-magnetic materials. The shielding achieved by the triaxial design provides extremely high immunity to interference.

 

 

Ideal for very low temperatures / cryogenic technology: The temperature-stable sensor design enables applications around absolute zero while maintaining nanometer resolution.

 

 

 
 

 

 
  • capaNCDT 6500
  • capaNCDT 6500 Sensors
  • Product Technology

Capacitive multi-channel system for maximum resolution                                                        Product Technology

 
Catalog capaNCDT sensors
Data sheet capaNCDT 6500
 
 
Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometer resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analog output, an EtherCAT(R) interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronization of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser.
 

 Characteristics

  •  Measuring ranges (mm): 0.05 | 0.2 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10
  •  Resolution max. 0.0375nm
  •  Linearity max. 0.01µm
  •  Frequency response 8.5kHz (-3dB)
  •  Data rate (digital output) 7.8kHz
  •  Analog output (voltage/current)
  •  Ethernet, EtherCAT
  •  Modular – up to 8 channels
  •  External or internal preamplifier
  •  User-friendly set up and configuration via web interface
 

Maximum resolution

The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometer resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. The modular capaNCDT 6500 is designed for multi-channel applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics.

 

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearization.

 
 

 

  1. Micro-Epsilon | capaNCDT 6350
  2. Micro-Epsilon | capaNCDT 6300
  3. Micro-Epsilon | capaNCDT 6100
  4. Micro Epsilon | Capacitive Sensors | capaNCDT 6019

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