SCIENCEGATE

  • Home
  • Products
  • Profile
  • About Us
    • Events
    • Career
  • Contacts
 

Contact Us (65) 6561 0488

 

Capacitive sensors for specific applications

 
Application examples are often found where the standard versions of the sensors and the controller are performing at their limits. For these special tasks, the measurement systems can be modified according to the customer’s individual requirements. Changes requested include, for example, modified designs, target calibration, mounting options, individual cable lengths, modified measuring ranges or sensors with integrated controller.
 
Catalog capaNCDT sensors
 

 Characteristics

  •  Modified measuring ranges and cable lengths
  •  Special sensor designs: clean room-compatible, for extremely low temperatures (4°K), material option (Invar® or
  •     Titanium), with thread
  •  Sensors with integrated electronics
  •  Special coordination to your target
  •  Output options
 

Capacitive displacement sensors with Embedded Capa Technology (ECT)

Capacitive sensors with Embedded Capa Technology are designed using a innovative manufacturing technique, which provides the sensor with significantly higher long-term stability. The electrode is embedded in an extremely stable carrier material that provides significantly higher temperature stability compared to conventional sensor designs. This new technology enables different sensor designs in a temperature range from -270°C to +200°C.

Capacitive sensors for magnetic fields, very low temperatures (cryogenics) and vacuum

   
Capacitive sensors from Micro-Epsilon are often used in vacuum and clean room applications where they achieve resolutions in the nanometer range. Sensors, cables and feed-through are particle-free to a high degree and used in clean room class 1.  

For environments with strong magnetic fields, Micro-Epsilon offers sensors and cables which are made from non-magnetic materials. The shielding achieved by the triaxial design provides extremely high immunity to interference.

 

 

Ideal for very low temperatures / cryogenic technology: The temperature-stable sensor design enables applications around absolute zero while maintaining nanometer resolution.

 

 

 
 

 

 

Capacitive multi-channel system for maximum resolution                                                        Product Technology

 
Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometer resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analog output, an EtherCAT(R) interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronization of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser.
 
Catalog capaNCDT sensors
Data sheet capaNCDT 6500
 

 Characteristics

  •  Measuring ranges (mm): 0.05 | 0.2 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10
  •  Resolution max. 0.0375nm
  •  Linearity max. 0.01µm
  •  Frequency response 8.5kHz (-3dB)
  •  Data rate (digital output) 7.8kHz
  •  Analog output (voltage/current)
  •  Ethernet, EtherCAT
  •  Modular – up to 8 channels
  •  External or internal preamplifier
  •  User-friendly set up and configuration via web interface
 

Maximum resolution

The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometer resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. The modular capaNCDT 6500 is designed for multi-channel applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics.

 

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearization.

 

Capacitive controller with sub-nanometer resolution – capaNCDT 6530 controller

The capacitive DT6530 controller offers maximum resolution and signal stability for capacitive displacement measurement. The controller can be operated with up to 8 channels and is not only suitable for electrically conductive objects, but also for insulators. In addition to analog outputs, the controller is also equipped with an Ethernet digital interface. The DT6530 controller is compatible with all sensors and cables of the capaNCDT series.

 

 Characteristics

  •  Resolution dynamic 0.002 % FSO (8.5kHz)
  •  Frequency response 8.5kHz (-3 dB) (switchable 20Hz; 1kHz;
  •     8.5kHz)
  •  Analog output 0...10V (short circuit proof), 4...20mA; 0...20mA
  •  Digital interface Ethernet 24 Bit; EtherCAT
  •  Special tuning: up to quadruple standard cable length
Data sheet capaNCDT 6500
 

New: Mounting frame for two-sided thickness measurements MA-CS-3 / MA-CS-2-C

The DT6222 capacitive controller is used for dynamic, capacitive measurement tasks. A frequency response of up to 20kHz (-3dB) enables reliable monitoring of fast processes. As well as analog outputs, the controller is also equipped with a digital Ethernet interface. The DT6222 controller is compatible with all sensors and cables of the capaNCDT series.

 
 

 Characteristics

  •  Multi-track thickness measurement at up to 3 points
  •    simultaneously
  •  High temperature stability for precise measurements at
  •    temperatures of up to 100 °C
  •  Suitable for vacuum
  •  Extremely compact design
  •  Easy integration and retrofitting in existing systems
  •  Compatible with capaNCDT sensors
  •  Calibratable design for high precision in thickness measurements
Data sheet Mounting frame for two-sided thickness measurements
 
 

 

 

Capacitive single channel system for dynamic measurements

 
The capacitive sensor system capaNCDT 6350 is designed for industrial use in production plants, for measuring and testing during in-process quality assurance. The capacitive measuring principle ensures very stable and very accurate measuring results.
 

 Characteristics

  •  Measuring ranges (mm): 0.2 | 0.5 | 1 | 2 | 3 | 5 | 10
  •  Linearity max. 0.6µm
  •  Resolution max. 0.01µm
  •  High stability and accuracy
  •  Nanoresolution
  •  High functionality due to integrated DSP
  •  Bandwidth 50 kHz
  •  Wear-free and maintenance-free
  •  Linear characteristics
  •  Suitable for all electrically conductive materials
  •  High measuring rates
 
 

 

 

High resolution capacitive measurement system

 
The capacitive sensor system capaNCDT 6300/6310 is designed for industrial use in production plants, for measuring and testing during in-process quality assurance. The capacitive measuring principle ensures very stable and very accurate measuring results.
 

 Characteristics

  •  Measuring ranges (mm): 0.05 | 0.2 | 0.5 | 1 | 2 | 3 | 5 | 10
  •  Linearity max. 0.1µm
  •  Resolution max. 0.0005µm
  •  High stability and accuracy
  •  Wear-free and maintenance-free
  •  Linear characteristics
  •  Suitable for all electrically conductive materials
 
 

 

 

Compact capacitive single channel system for precisemeasurements

 
The capaNCDT 6100 is a capacitve sensor system for non-contact displacement and position measurement. Typical applications can be found in positioning, wear measurements, gap measurements, displacement, roundness and others.
 

 Characteristics

  •  Measuring ranges (mm): 0.2 | 0.5 | 1 | 2 | 3 | 5 | 10
  •  Linearity max. 0.2µm
  •  Resolution max. 0.03µm
  •  High stability and accuracy
  •  Wear-free and maintenance-free
  •  Linear characteristics
  •  Suitable for all electrically conductive materials
 
 

 

  1. Micro Epsilon | Capacitive Sensors | capaNCDT 6019
  2. Micro-Epsilon | Capacitive Displacement Sensors
  3. Micro-Epsilon | Technical Endoscopes
  4. Micro Epsilon | Color Sensors

Page 44 of 45

  • 36
  • 37
  • 38
  • 39
  • 40
  • 41
  • 42
  • 43
  • 44
  • 45

Brands

  • BeanAir
  • Control Techniques
  • Delphin
  • Exemys
  • Flowline
  • Futek
  • Hakko
  • Kansai
  • KARI
  • LCM System
  • Micro Epsilon
  • MIRUS
  • Pavone
  • Proface
  • Solartron Metrology
  • STS
  • Takikawa
  • VALCOM
  • WINMATE

About Us

  • Events
  • Career
  • Download
  • Contacts
bizSAFE3
PGO9
 

SCIGATE AUTOMATION (S) PTE LTD @ 2025. ALL RIGHTS RESERVED.