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Capacitive sensors for specific applications
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Application examples are often found where the standard versions of the sensors and the controller are performing at their limits. For these special tasks, the measurement systems can be modified according to the customer’s individual requirements. Changes requested include, for example, modified designs, target calibration, mounting options, individual cable lengths, modified measuring ranges or sensors with integrated controller. |
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Capacitive displacement sensors with Embedded Capa Technology (ECT)
Capacitive sensors with Embedded Capa Technology are designed using a innovative manufacturing technique, which provides the sensor with significantly higher long-term stability. The electrode is embedded in an extremely stable carrier material that provides significantly higher temperature stability compared to conventional sensor designs. This new technology enables different sensor designs in a temperature range from -270°C to +200°C.
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Capacitive sensors for magnetic fields, very low temperatures (cryogenics) and vacuum
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Capacitive sensors from Micro-Epsilon are often used in vacuum and clean room applications where they achieve resolutions in the nanometer range. Sensors, cables and feed-through are particle-free to a high degree and used in clean room class 1. |
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For environments with strong magnetic fields, Micro-Epsilon offers sensors and cables which are made from non-magnetic materials. The shielding achieved by the triaxial design provides extremely high immunity to interference.
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Ideal for very low temperatures / cryogenic technology: The temperature-stable sensor design enables applications around absolute zero while maintaining nanometer resolution.
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Capacitive multi-channel system for maximum resolution Product Technology
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Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometer resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analog output, an EtherCAT(R) interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronization of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser. |
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Maximum resolution
The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometer resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. The modular capaNCDT 6500 is designed for multi-channel applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics.
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Ease of use via web interface
Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearization.
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Capacitive controller with sub-nanometer resolution – capaNCDT 6530 controller
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The capacitive DT6530 controller offers maximum resolution and signal stability for capacitive displacement measurement. The controller can be operated with up to 8 channels and is not only suitable for electrically conductive objects, but also for insulators. In addition to analog outputs, the controller is also equipped with an Ethernet digital interface. The DT6530 controller is compatible with all sensors and cables of the capaNCDT series.
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New: Mounting frame for two-sided thickness measurements MA-CS-3 / MA-CS-2-C
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The DT6222 capacitive controller is used for dynamic, capacitive measurement tasks. A frequency response of up to 20kHz (-3dB) enables reliable monitoring of fast processes. As well as analog outputs, the controller is also equipped with a digital Ethernet interface. The DT6222 controller is compatible with all sensors and cables of the capaNCDT series.
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Capacitive single channel system for dynamic measurements
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The capacitive sensor system capaNCDT 6350 is designed for industrial use in production plants, for measuring and testing during in-process quality assurance. The capacitive measuring principle ensures very stable and very accurate measuring results. |
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High resolution capacitive measurement system
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The capacitive sensor system capaNCDT 6300/6310 is designed for industrial use in production plants, for measuring and testing during in-process quality assurance. The capacitive measuring principle ensures very stable and very accurate measuring results. |
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Compact capacitive single channel system for precisemeasurements
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The capaNCDT 6100 is a capacitve sensor system for non-contact displacement and position measurement. Typical applications can be found in positioning, wear measurements, gap measurements, displacement, roundness and others. |
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