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High-performance inductive displacement measuring system                                                   Product Technology

 
Catalog eddyNCDT Sensors
Data sheet eddyNCDT 306x
Data sheet eddyNCDT 307x
 
 
 
Non-contact, inductive displacement sensors from Micro-Epsilon operate according to the eddy current measuring principle. Unlike conventional, inductive displacement sensors, they measure on ferromagnetic and non-ferromagnetic materials providing high accuracy, frequency response and temperature stability. Due to their immunity to oil, dirt, pressure and temperature, these inductive eddy current sensors are primarily used for integration in machines and facilities.
 

 Characteristics

  •  Ideal for integration into plant and machinery
  •  Easy integration with modern fieldbus connection and smart signal processing
  •  Combination of resolution, linearity and temperature stability sets new standards
  •  Wide range of applications with numerous sensor models
  •  Maximum ease of use and intuitive configuration via web interface
 
DT3060 DT3061 DT3070 DT3071
Sensors with measuring ranges ≥1 mm Sensors with measuring ranges <1 mm
3-point calibration 5-point calibration 3-point calibration 5-point calibration
- Switching and temperature outputs - Switching and temperature outputs
- Storage of multiple characteristics - Storage of multiple characteristics

 

Performance and universality for industrial use

The new, powerful & inductive eddyNCDT 3060/3070 measuring systems are ideal for fast and precise displacement measurements. Equipped with a compact controller, a sensor and an integrated cable, these systems are factory-calibrated either for ferromagnetic or non-ferromagnetic materials. With numerous sensor models, high speed and smart signal processing, they define a new performance class in inductive displacement measurement.

Ideal for integration into plant and machinery

As sensor and controller are temperature-compensated, very high measurement accuracies can be achieved even in fluctuating temperatures. The sensors are designed for ambient temperatures up to a maximum of +200°C and an ambient pressure up to 700 bar.

New benchmark in controller technology

The industrial-grade M12 Ethernet interface enables a modern fieldbus connection. Configurable analog outputs enable to output the measured values as voltage or current. When connecting a PC via the Ethernet interface, a modern web interface can be accessed without any further installation and enables the software setting of sensor and controller.

 

Maximum performance with eddyNCDT 3061/3071

The DT3061/3071 controllers provides enhanced features such as 5-point calibration, switching and temperature outputs, as well as storage of multiple characteristic curves. As eddyNCDT 3060/3070 systems are equipped with an innovative frequency separation feature, no synchronization is necessary with multi-channel measurements.

 
 

 

DOWNLOADS

 Data sheet confocalDT IFS2407            
 

Compact, confocal 90° sensor for displacement and surface roughness measurements – confocalDT IFS2407/90-0,3

 

The confocal chromatic confocalDT IFS2407/90-0,3 90° sensor is designed for precision displacement and surface roughness measurements. The sensor is equipped with a 90° lens and is therefore ideally suited to installation in restricted spaces. The lens in the sensor generates a small measurement spot size, which enables a high spatial resolution. The small measurement spot size combined with a large tilt angle enable roughness measurements where maximum precision is required.

Measuring range (mm): 0.3
Linearity: max. 0.75µm
Resolution: max. 10nm
Ideal for displacement and roughness measurements
Small measurement spot size: 6µm
High sensitivity and large tilt angle
 
 

 

 
  • capaNCDT DT61x0/IP
  • capaNCDT DT61x0/IP Sensors
  • Product Technology
 

Capacitive measuring system IP68 for industrial applications

 
Catalog capaNCDT sensors
Data sheet capaNCDT 61x0/IP
 
 
The capaNCDT DT61x0/IP is an industrial-grade, capacitive sensor system for displacement, distance and position measurements. Consisting of a sensor, a sensor cable and a controller, the measuring system is ready for use without any on-site calibration. Due to its very good temperature stability, immunity to magnetic fields and robust design that is protected to IP68, the capaNCDT DT61x0/IP is used for industrial measurement tasks such as air gap measurement in generators and regulation of plant and machinery.
 

 Characteristics

  •  Measuring ranges (mm): 0.5 | 1 | 1.25 | 2 | 3 | 4 | 6
  •  Linearity max. 1 µm
  •  Resolution max. 0.05 µm
  •  Voltage output
  •  Digital RS485 interface (DT6120/IP)
  •  Dust-proof and watertight aluminum die-cast housing (IP68)
  •  Robust and temperature-resistant sensor cable
  •  Broad sensor range (gap sensor/board design / cylindrical sensor / thread sensor)
 
 

 

 

Semiconductors

Measurement tasks in the semiconductor industry require highest accuracy and repeatability. Micro-Epsilon offers the right solution for numerous applications from precise machine positioning and wafer inspection to topographic measurements.
 

High precision thickness measurement of silicon wafers

Capacitive displacement sensors are used for the exact thickness measurement of wafers. Two opposing sensors detect the thickness and also determine other parameters such as deflection or sawing marks. The position of the wafer in the measuring gap may vary.

Capacitive displacement sensors and measurement systems

 

 

 

 

 

Bow and warp of wafers

Confocal chromatic sensors scan the wafer surface to detect bow, warp and distortion. Providing a measuring rate of 70 kHz, confocalDT controllers enable highly dynamic measurements, allowing the wafer to be inspected within short cycle times.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

 

Detection and measurement of saw marks

For automatic detection and measurement of saw marks, confocal chromatic sensors from Micro-Epsilon are used. The fast surface compensation feature of the controller regulates the exposure cycles in order to achieve maximum signal stability on surfaces with varying reflection characteristics. As confocal sensors from Micro-Epsilon can tolerate a large tilt angle and offer an extremely small light spot, they reliably detect saw marks and other indentations on the wafer.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

 

Recognition and measurement of bumps on silicon wafers

Confocal chromatic displacement sensors from Micro-Epsilon are used to inspect bumps. They generate a small light spot onto the wafer, while reliably detecting the smallest of parts and structures at high resolutions. Therefore, shape and dimensions of bumps are reliably measured for contacting purposes.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

 

Transparent layers & adhesive beading

Confocal chromatic sensors are used for one-sided layer thickness measurements. The confocal measuring principle enables the evaluation of several signal peaks, allowing the thickness of transparent materials to be determined. With the multi-peak measurement feature, the confocalDT controller reliably determines the thickness of protective coatings and paint layers.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

Wafer thickness measurement / TTV

Confocal chromatic sensors measure the thickness deviation (Total Thickness Variation) and the wafer thickness from both sides. Based on the wafer thickness profile, bow and warp of the wafer can be detected. High measuring rates enable thickness detection of the entire wafer in short cycle times.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

 

Inspection of cracks and breakages

Confocal chromatic sensors from Micro-Epsilon are used to detect cracks and other defects on the wafer. They reliably detect surfaces with varying reflection characteristics due to a fast surface compensation feature. An extremely small light spot and high resolution enable the reliable detection of the finest of anomalies on the wafer.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

Positioning of the lens system in lithography machines

Non-contact, inductive displacement sensors (eddy current) measure the position of lens elements in order to achieve the highest possible imaging accuracy. Depending on the lens system, displacement sensors from Micro-Epsilon are used to detect movement and position in up to 6 degrees of freedom. Providing a high frequency response, eddyNCDT sensors also monitor highly dynamic movements of the lens system.

Inductive sensors (eddy current) for displacement, distance & position

 

 

 

 

 

Positioning the wafer stage

Non-contact sensors from Micro-Epsilon are used for position monitoring of the wafer stage, where they measure highly dynamic XYZ movements of the stage which accelerates very rapidly. Capacitive and inductive (eddy current) sensors achieve nanometer resolution in order to ensure that the wafer is precisely positioned for the exposure process. These innovative sensors can be used in vacuum applications and are insensitive to strong magnetic fields.

Capacitive displacement sensors and measurement systems

Inductive sensors (eddy current) for displacement, distance & position

 

 

 

 

Nanometer positioning in lithography machines

To illuminate individual components on the wafer, the lithographic devices move the wafer to the respective position. Capacitive displacement sensors measure the position of the travel path in order to enable nanometer-accurate positioning.

Capacitive displacement sensors and measurement systems

 

 

 

 

Positioning of masks in lithography

Lithography processes require high resolution and long-term measurement of machine movements in order to achieve maximum precision. High resolutions enable nanometer-precise positioning of masks using capacitive sensors from Micro-Epsilon. Their vacuum-suitable design enables the sensors and cables to be used in ultra-high vacuum.

capaNCDT 6200

 

 

 

 
 

 

 

Precision Optics

Measuring tasks in the optics industry are a huge challenge for sensors. Shiny and reflective targets often present complex shapes and must be measured with high resolution and speed.
 

Testing the quality of objectives for microscopy and smartphones

Testing the imaging quality of lenses is based on wavefront measurements on the optical axis and in the field. Furthermore, automated measurement procedures provide information about focal length, chromatic aberration, polarization effects, PSF and MTF.

Optische Systeme von Optocraft - SHSInspect 2Xpass, SHSInspect RL module

 

 

 

 

 

Measuring the refractive data of contact lenses

When measuring the distribution of the refractive power, the imaging quality and the lens diameter of soft and hard contact lenses, measuring systems based on wavefront technology are used. Ergonomic lens handling and high measuring speed play a decisive role here.

Optische Systeme von Optocraft - SHSOphthalmic cito

 

 

 

 

 

Adjusting laser systems

In addition to beam parameter measurements, Shack-Hartmann wavefront sensors are also used to adjust laser systems or fiber-optic systems. The advantage here is their insensitivity to vibrations, suitability for different wavelength ranges, as well as their high dynamic range.

Optische Systeme von Optocraft - SHSLab

 

 

 

 

 

Testing and adjusting binoculars/spotting scopes and objectives

The precise measurement of the transmitted wavefront provides a qualitative assessment of the imaging quality of an optical system while enabling inline adjustment of the system. The SHSInspect RL measuring module can be flexibly integrated into a test bench.

Optische Systeme von Optocraft - SHSInspect RL module

 

 

 

 

 

Measuring the refractive data of intra-ocular lenses

When measuring the distribution of the refractive power, the imaging quality and the lens diameter of intra-ocular lenses, measuring systems based on wavefront technology are used. Ergonomic lens handling and high measuring speed play a decisive role here.

Optische Systeme von Optocraft - SHSOphthalmic base

 

 

 

 

Measuring the surface shape of contact lenses and molds

In order to control and optimize processes, the front and back of the contact lens are measured with incident light during the production process. Molds and tools are measured as well as the calculation of tool offsets.

Optische Systeme von Optocraft - SHSOphthalmic autoROC

 

 

 

 

 

Measuring the optical quality of flat optics

High demands are often placed on the quality of optical filters and windows. Optocraft offers turnkey solutions for measuring wavefront errors in transmitted light and surface defects.

Optische Systeme von Optocraft - SHSInspect 1Xpass

 

 

 

 

Measuring the curvature of lenses

In order to meet production tolerances, the contour of optical lenses such as eyeglass lenses or objectives, confocal chromatic sensors are used. Based on the distance values, statements about the surface properties can also be made. The sensors enable a large tilt angle which means they can also detect highly curved surfaces.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

 

Camera auto focus measurement

Confocal sensors measure the distances between the auto focus lenses to provide the camera with the highest possible image quality.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

Surface inspection of mirrors

With optical components such as mirrors, a high degree of surface homogeneity is required. reflectCONTROL sensors are used to test the reflecting surfaces of these reflecting surfaces. They detect and classify surface deviations on the mirror surface.

Inspection system for shiny surfaces

 

 

 

 

Quality assurance based on multi-functional optical testing

Optical systems are used in a wide variety of industries and applications, including a wide range of products from micro-optics with dimensions in the μm range to telescope lenses with diameters of several meters. Optocraft delivers multifunctional systems based on the Shack-Hartmann wavefront technology for optics testing. Providing information about the quality of the optics based on precise wavefront measurements, these measuring systems contribute to the optimization of development and manufacturing processes.

Optische Systeme von Optocraft

 

 

 

 

Measuring the center thickness of lenses

In order to meet production tolerances, the center thickness of optical lenses such as eyeglass lenses or objectives is measured using confocal chromatic sensors. The measurement is performed from one side and can also be carried out with very thin lenses.

Confocal sensor systems for displacement, distance, position and thickness

 

 

 

 

Nanometer positioning in lithography machines

To illuminate individual components on the wafer, the lithographic devices move the wafer to the respective position. Capacitive displacement sensors measure the position of the travel path in order to enable nanometer-accurate positioning.

Capacitive displacement sensors and measurement systems

 

 

 

 

Measurement of contact lenses

Contact lens manufacturers have a need to conduct various material tests on clear, flexible polymer samples. The material samples must be submerged during testing in a saline solution for hydration. The highly sophisticated ThruBeam model ODC2600-40 is uniquely capable of making dimensional measurements with high accuracy and speed.

High resolution optical micrometer

 

 

 

 
 

 

  1. Micro-Epsilon | Applications | Plastics
  2. Micro-Epsilon | Applications | Paint Inspection
  3. Micro-Epsilon | Applications | Mobile Machines
  4. Micro-Epsilon | Applications | Metrology and Testing Technology

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