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High-performance inductive displacement measuring system  Product Technology
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| Non-contact, inductive displacement sensors from Micro-Epsilon operate according to the eddy current measuring principle. Unlike conventional, inductive displacement sensors, they measure on ferromagnetic and non-ferromagnetic materials providing high accuracy, frequency response and temperature stability. Due to their immunity to oil, dirt, pressure and temperature, these inductive eddy current sensors are primarily used for integration in machines and facilities. |
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| DT3060 |
DT3061 |
DT3070 |
DT3071 |
| Sensors with measuring ranges ≥1 mm |
Sensors with measuring ranges <1 mm |
| 3-point calibration |
5-point calibration |
3-point calibration |
5-point calibration |
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Switching and temperature outputs |
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Switching and temperature outputs |
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Storage of multiple characteristics |
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Storage of multiple characteristics |
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Performance and universality for industrial use
The new, powerful & inductive eddyNCDT 3060/3070 measuring systems are ideal for fast and precise displacement measurements. Equipped with a compact controller, a sensor and an integrated cable, these systems are factory-calibrated either for ferromagnetic or non-ferromagnetic materials. With numerous sensor models, high speed and smart signal processing, they define a new performance class in inductive displacement measurement.
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Ideal for integration into plant and machinery
As sensor and controller are temperature-compensated, very high measurement accuracies can be achieved even in fluctuating temperatures. The sensors are designed for ambient temperatures up to a maximum of +200°C and an ambient pressure up to 700 bar.
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New benchmark in controller technology
The industrial-grade M12 Ethernet interface enables a modern fieldbus connection. Configurable analog outputs enable to output the measured values as voltage or current. When connecting a PC via the Ethernet interface, a modern web interface can be accessed without any further installation and enables the software setting of sensor and controller.
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Maximum performance with eddyNCDT 3061/3071
The DT3061/3071 controllers provides enhanced features such as 5-point calibration, switching and temperature outputs, as well as storage of multiple characteristic curves. As eddyNCDT 3060/3070 systems are equipped with an innovative frequency separation feature, no synchronization is necessary with multi-channel measurements.
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Compact, confocal 90° sensor for displacement and surface roughness measurements – confocalDT IFS2407/90-0,3
The confocal chromatic confocalDT IFS2407/90-0,3 90° sensor is designed for precision displacement and surface roughness measurements. The sensor is equipped with a 90° lens and is therefore ideally suited to installation in restricted spaces. The lens in the sensor generates a small measurement spot size, which enables a high spatial resolution. The small measurement spot size combined with a large tilt angle enable roughness measurements where maximum precision is required.
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Measuring range (mm): 0.3
Linearity: max. 0.75µm
Resolution: max. 10nm
Ideal for displacement and roughness measurements
Small measurement spot size: 6µm
High sensitivity and large tilt angle
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Capacitive measuring system IP68 for industrial applications
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| The capaNCDT DT61x0/IP is an industrial-grade, capacitive sensor system for displacement, distance and position measurements. Consisting of a sensor, a sensor cable and a controller, the measuring system is ready for use without any on-site calibration. Due to its very good temperature stability, immunity to magnetic fields and robust design that is protected to IP68, the capaNCDT DT61x0/IP is used for industrial measurement tasks such as air gap measurement in generators and regulation of plant and machinery. |
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Semiconductors
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Measurement tasks in the semiconductor industry require highest accuracy and repeatability. Micro-Epsilon offers the right solution for numerous applications from precise machine positioning and wafer inspection to topographic measurements. |
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High precision thickness measurement of silicon wafers
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Capacitive displacement sensors are used for the exact thickness measurement of wafers. Two opposing sensors detect the thickness and also determine other parameters such as deflection or sawing marks. The position of the wafer in the measuring gap may vary.
 Capacitive displacement sensors and measurement systems
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Bow and warp of wafers
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Detection and measurement of saw marks
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For automatic detection and measurement of saw marks, confocal chromatic sensors from Micro-Epsilon are used. The fast surface compensation feature of the controller regulates the exposure cycles in order to achieve maximum signal stability on surfaces with varying reflection characteristics. As confocal sensors from Micro-Epsilon can tolerate a large tilt angle and offer an extremely small light spot, they reliably detect saw marks and other indentations on the wafer.
Confocal sensor systems for displacement, distance, position and thickness
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Recognition and measurement of bumps on silicon wafers
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Confocal chromatic displacement sensors from Micro-Epsilon are used to inspect bumps. They generate a small light spot onto the wafer, while reliably detecting the smallest of parts and structures at high resolutions. Therefore, shape and dimensions of bumps are reliably measured for contacting purposes.
Confocal sensor systems for displacement, distance, position and thickness
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Transparent layers & adhesive beading
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Confocal chromatic sensors are used for one-sided layer thickness measurements. The confocal measuring principle enables the evaluation of several signal peaks, allowing the thickness of transparent materials to be determined. With the multi-peak measurement feature, the confocalDT controller reliably determines the thickness of protective coatings and paint layers.
Confocal sensor systems for displacement, distance, position and thickness
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Wafer thickness measurement / TTV
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Confocal chromatic sensors measure the thickness deviation (Total Thickness Variation) and the wafer thickness from both sides. Based on the wafer thickness profile, bow and warp of the wafer can be detected. High measuring rates enable thickness detection of the entire wafer in short cycle times.
Confocal sensor systems for displacement, distance, position and thickness
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Inspection of cracks and breakages
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Confocal chromatic sensors from Micro-Epsilon are used to detect cracks and other defects on the wafer. They reliably detect surfaces with varying reflection characteristics due to a fast surface compensation feature. An extremely small light spot and high resolution enable the reliable detection of the finest of anomalies on the wafer.
Confocal sensor systems for displacement, distance, position and thickness
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Positioning of the lens system in lithography machines
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Non-contact, inductive displacement sensors (eddy current) measure the position of lens elements in order to achieve the highest possible imaging accuracy. Depending on the lens system, displacement sensors from Micro-Epsilon are used to detect movement and position in up to 6 degrees of freedom. Providing a high frequency response, eddyNCDT sensors also monitor highly dynamic movements of the lens system.
Inductive sensors (eddy current) for displacement, distance & position
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Positioning the wafer stage
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Nanometer positioning in lithography machines
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To illuminate individual components on the wafer, the lithographic devices move the wafer to the respective position. Capacitive displacement sensors measure the position of the travel path in order to enable nanometer-accurate positioning.
Capacitive displacement sensors and measurement systems
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Positioning of masks in lithography
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Lithography processes require high resolution and long-term measurement of machine movements in order to achieve maximum precision. High resolutions enable nanometer-precise positioning of masks using capacitive sensors from Micro-Epsilon. Their vacuum-suitable design enables the sensors and cables to be used in ultra-high vacuum.
capaNCDT 6200
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Precision Optics
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Measuring tasks in the optics industry are a huge challenge for sensors. Shiny and reflective targets often present complex shapes and must be measured with high resolution and speed. |
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Testing the quality of objectives for microscopy and smartphones
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Measuring the refractive data of contact lenses
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When measuring the distribution of the refractive power, the imaging quality and the lens diameter of soft and hard contact lenses, measuring systems based on wavefront technology are used. Ergonomic lens handling and high measuring speed play a decisive role here.
Optische Systeme von Optocraft - SHSOphthalmic cito
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Adjusting laser systems
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In addition to beam parameter measurements, Shack-Hartmann wavefront sensors are also used to adjust laser systems or fiber-optic systems. The advantage here is their insensitivity to vibrations, suitability for different wavelength ranges, as well as their high dynamic range.
Optische Systeme von Optocraft - SHSLab
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Testing and adjusting binoculars/spotting scopes and objectives
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The precise measurement of the transmitted wavefront provides a qualitative assessment of the imaging quality of an optical system while enabling inline adjustment of the system. The SHSInspect RL measuring module can be flexibly integrated into a test bench.
Optische Systeme von Optocraft - SHSInspect RL module
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Measuring the refractive data of intra-ocular lenses
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When measuring the distribution of the refractive power, the imaging quality and the lens diameter of intra-ocular lenses, measuring systems based on wavefront technology are used. Ergonomic lens handling and high measuring speed play a decisive role here.
Optische Systeme von Optocraft - SHSOphthalmic base
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Measuring the surface shape of contact lenses and molds
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In order to control and optimize processes, the front and back of the contact lens are measured with incident light during the production process. Molds and tools are measured as well as the calculation of tool offsets.
Optische Systeme von Optocraft - SHSOphthalmic autoROC
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Measuring the optical quality of flat optics
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Measuring the curvature of lenses
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In order to meet production tolerances, the contour of optical lenses such as eyeglass lenses or objectives, confocal chromatic sensors are used. Based on the distance values, statements about the surface properties can also be made. The sensors enable a large tilt angle which means they can also detect highly curved surfaces.
Confocal sensor systems for displacement, distance, position and thickness
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Camera auto focus measurement
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Surface inspection of mirrors
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With optical components such as mirrors, a high degree of surface homogeneity is required. reflectCONTROL sensors are used to test the reflecting surfaces of these reflecting surfaces. They detect and classify surface deviations on the mirror surface.
Inspection system for shiny surfaces
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Quality assurance based on multi-functional optical testing
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Optical systems are used in a wide variety of industries and applications, including a wide range of products from micro-optics with dimensions in the μm range to telescope lenses with diameters of several meters. Optocraft delivers multifunctional systems based on the Shack-Hartmann wavefront technology for optics testing. Providing information about the quality of the optics based on precise wavefront measurements, these measuring systems contribute to the optimization of development and manufacturing processes.
Optische Systeme von Optocraft
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Measuring the center thickness of lenses
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Nanometer positioning in lithography machines
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To illuminate individual components on the wafer, the lithographic devices move the wafer to the respective position. Capacitive displacement sensors measure the position of the travel path in order to enable nanometer-accurate positioning.
Capacitive displacement sensors and measurement systems
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Measurement of contact lenses
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Contact lens manufacturers have a need to conduct various material tests on clear, flexible polymer samples. The material samples must be submerged during testing in a saline solution for hydration. The highly sophisticated ThruBeam model ODC2600-40 is uniquely capable of making dimensional measurements with high accuracy and speed.
High resolution optical micrometer
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Ideal for integration into plant and machinery
