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Semiconductors
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Measurement tasks in the semiconductor industry require highest accuracy and repeatability. Micro-Epsilon offers the right solution for numerous applications from precise machine positioning and wafer inspection to topographic measurements. |
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High precision thickness measurement of silicon wafers
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Capacitive displacement sensors are used for the exact thickness measurement of wafers. Two opposing sensors detect the thickness and also determine other parameters such as deflection or sawing marks. The position of the wafer in the measuring gap may vary.
 Capacitive displacement sensors and measurement systems
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Bow and warp of wafers
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Detection and measurement of saw marks
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For automatic detection and measurement of saw marks, confocal chromatic sensors from Micro-Epsilon are used. The fast surface compensation feature of the controller regulates the exposure cycles in order to achieve maximum signal stability on surfaces with varying reflection characteristics. As confocal sensors from Micro-Epsilon can tolerate a large tilt angle and offer an extremely small light spot, they reliably detect saw marks and other indentations on the wafer.
 Confocal sensor systems for displacement, distance, position and thickness
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Recognition and measurement of bumps on silicon wafers
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Confocal chromatic displacement sensors from Micro-Epsilon are used to inspect bumps. They generate a small light spot onto the wafer, while reliably detecting the smallest of parts and structures at high resolutions. Therefore, shape and dimensions of bumps are reliably measured for contacting purposes.
 Confocal sensor systems for displacement, distance, position and thickness
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Transparent layers & adhesive beading
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Confocal chromatic sensors are used for one-sided layer thickness measurements. The confocal measuring principle enables the evaluation of several signal peaks, allowing the thickness of transparent materials to be determined. With the multi-peak measurement feature, the confocalDT controller reliably determines the thickness of protective coatings and paint layers.
 Confocal sensor systems for displacement, distance, position and thickness
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Wafer thickness measurement / TTV
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Confocal chromatic sensors measure the thickness deviation (Total Thickness Variation) and the wafer thickness from both sides. Based on the wafer thickness profile, bow and warp of the wafer can be detected. High measuring rates enable thickness detection of the entire wafer in short cycle times.
 Confocal sensor systems for displacement, distance, position and thickness
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Inspection of cracks and breakages
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Confocal chromatic sensors from Micro-Epsilon are used to detect cracks and other defects on the wafer. They reliably detect surfaces with varying reflection characteristics due to a fast surface compensation feature. An extremely small light spot and high resolution enable the reliable detection of the finest of anomalies on the wafer.
 Confocal sensor systems for displacement, distance, position and thickness
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Positioning of the lens system in lithography machines
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Non-contact, inductive displacement sensors (eddy current) measure the position of lens elements in order to achieve the highest possible imaging accuracy. Depending on the lens system, displacement sensors from Micro-Epsilon are used to detect movement and position in up to 6 degrees of freedom. Providing a high frequency response, eddyNCDT sensors also monitor highly dynamic movements of the lens system.
 Inductive sensors (eddy current) for displacement, distance & position
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Positioning the wafer stage
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Nanometer positioning in lithography machines
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To illuminate individual components on the wafer, the lithographic devices move the wafer to the respective position. Capacitive displacement sensors measure the position of the travel path in order to enable nanometer-accurate positioning.
 Capacitive displacement sensors and measurement systems
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Positioning of masks in lithography
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Lithography processes require high resolution and long-term measurement of machine movements in order to achieve maximum precision. High resolutions enable nanometer-precise positioning of masks using capacitive sensors from Micro-Epsilon. Their vacuum-suitable design enables the sensors and cables to be used in ultra-high vacuum.
 capaNCDT 6200
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Precision Optics
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Measuring tasks in the optics industry are a huge challenge for sensors. Shiny and reflective targets often present complex shapes and must be measured with high resolution and speed. |
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Testing the quality of objectives for microscopy and smartphones
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Measuring the refractive data of contact lenses
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When measuring the distribution of the refractive power, the imaging quality and the lens diameter of soft and hard contact lenses, measuring systems based on wavefront technology are used. Ergonomic lens handling and high measuring speed play a decisive role here.
 Optische Systeme von Optocraft - SHSOphthalmic cito
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Adjusting laser systems
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In addition to beam parameter measurements, Shack-Hartmann wavefront sensors are also used to adjust laser systems or fiber-optic systems. The advantage here is their insensitivity to vibrations, suitability for different wavelength ranges, as well as their high dynamic range.
 Optische Systeme von Optocraft - SHSLab
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Testing and adjusting binoculars/spotting scopes and objectives
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The precise measurement of the transmitted wavefront provides a qualitative assessment of the imaging quality of an optical system while enabling inline adjustment of the system. The SHSInspect RL measuring module can be flexibly integrated into a test bench.
 Optische Systeme von Optocraft - SHSInspect RL module
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Measuring the refractive data of intra-ocular lenses
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When measuring the distribution of the refractive power, the imaging quality and the lens diameter of intra-ocular lenses, measuring systems based on wavefront technology are used. Ergonomic lens handling and high measuring speed play a decisive role here.
 Optische Systeme von Optocraft - SHSOphthalmic base
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Measuring the surface shape of contact lenses and molds
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In order to control and optimize processes, the front and back of the contact lens are measured with incident light during the production process. Molds and tools are measured as well as the calculation of tool offsets.
 Optische Systeme von Optocraft - SHSOphthalmic autoROC
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Measuring the optical quality of flat optics
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Measuring the curvature of lenses
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In order to meet production tolerances, the contour of optical lenses such as eyeglass lenses or objectives, confocal chromatic sensors are used. Based on the distance values, statements about the surface properties can also be made. The sensors enable a large tilt angle which means they can also detect highly curved surfaces.
 Confocal sensor systems for displacement, distance, position and thickness
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Camera auto focus measurement
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Surface inspection of mirrors
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With optical components such as mirrors, a high degree of surface homogeneity is required. reflectCONTROL sensors are used to test the reflecting surfaces of these reflecting surfaces. They detect and classify surface deviations on the mirror surface.
 Inspection system for shiny surfaces
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Quality assurance based on multi-functional optical testing
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Optical systems are used in a wide variety of industries and applications, including a wide range of products from micro-optics with dimensions in the μm range to telescope lenses with diameters of several meters. Optocraft delivers multifunctional systems based on the Shack-Hartmann wavefront technology for optics testing. Providing information about the quality of the optics based on precise wavefront measurements, these measuring systems contribute to the optimization of development and manufacturing processes.
 Optische Systeme von Optocraft
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Measuring the center thickness of lenses
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Nanometer positioning in lithography machines
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To illuminate individual components on the wafer, the lithographic devices move the wafer to the respective position. Capacitive displacement sensors measure the position of the travel path in order to enable nanometer-accurate positioning.
 Capacitive displacement sensors and measurement systems
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Measurement of contact lenses
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Contact lens manufacturers have a need to conduct various material tests on clear, flexible polymer samples. The material samples must be submerged during testing in a saline solution for hydration. The highly sophisticated ThruBeam model ODC2600-40 is uniquely capable of making dimensional measurements with high accuracy and speed.
 High resolution optical micrometer
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Plastics production and processing
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Micro-Epsilon offers a wide range of sensors and solutions for non-contact measurement of plastics production. Dimensions, thickness, temperature, colors and embossing patterns in roll or sheet form can be reliably measured in a wide range of process steps from extrusion via molding to further processing. |
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Two-sided thickness measurement
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Depending on the respective measurement task, it is sensible to carry out a two-sided thickness measurement. Arranged opposite the material, two displacement sensors detect the thickness. This measurement arrangement is particularly suitable for high speed measurements and fluttering materials. Micro-Epsilon also offers sensors and turnkey systems for two-sided thickness measurements.
 Measuring and inspection systems for plastics
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Defect recognition on worktops
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Foreign bodies, uneven distribution of the adhesive or unevenness when closing may produce open joints between the top material and the sidebars. The scanCONTROL laser profile sensors check if there are open joints and detect their gap size.
 Laser scanners for 2D/3D profile measurements
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Thickness profile measurement of strips and plates
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Temperature monitoring of thin plastic films
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With blown film extrusion, non-contact temperature measurement is a difficult measurement task. Ambient radiation also penetrates thin films and distorts the intrinsic radiation of the films. The infrared CT-P3 and CT-P7 pyrometers only detect the infrared radiation emitted by the plastic films and ignore the penetrated ambient radiation. This is how high precision detection of the surface temperature is possible.
 Infrared pyrometers for universal measurements
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One-sided thickness measurement of films
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In its sensor housing, the combiSENSOR combines an eddy current displacement sensor and a capacitive displacement sensor. This unique sensor concept enables one-sided thickness measurement of electrically non-conductive materials on metallic objects. Its field of application is the thickness measurement of plastic film or of plastic coating on metal plates. Connected to the sensor via a cable, the controller processes and calculates the signals in order to put them out via interfaces.
 One-sided thickness measurement of plastics
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Thermography for injection molding processes
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moldCONTROL is a thermography solution for recognizing quality fluctuations in injection molding production. The compact, industrial thermal imaging camera captures a thermal image of the component directly after the injection molding process. The software compares the infrared images associated with the component (actual) to stored references (target). The identified temperature differences provide the basis for a good/bad decision reported back to the handling system.
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Gap measurement of extruded plastic profiles
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In the extrusion of high quality plastic profiles, adherence to tight manufacturing tolerances is crucial. For quality assurance, laser profile scanners from Micro-Epsilon are used. Thanks to the surface compensation, the scanners reliably detect the profiles of black rubber surfaces. For gap measurement, special software packages are available with which different parameters can be easily selected.
 Laser scanners for 2D/3D profile measurements
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Surface defect detection of plastic attachments
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Surfaces play an important role in the functionality and aesthetics of plastic components. Therefore, optical surface inspection is a central approach for 100% quality control. Deflectometer-based inspection systems from Micro-Epsilon inspect shiny surfaces and detect even the smallest of deviations. The defects found are evaluated and displayed in the 3D model.
 Sensors for painting and paint inspection
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Inline color measurement of transparent films
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As well as color fluctuations, streaks can occur during production. With translucent films, the film color is measured very accurately and quickly using the ACS7000 color measuring system together with the ACS3 transmission sensor.
 High Speed Photospectrometer colorCONTROL ACS7000
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Color measurement of extruded parts
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In order to avoid defective production and to conserve resources during the extrusion of plastic products, it is crucial to recognize color deviations not just at the end of the process chain but already during the ongoing process. The accurate colorSENSOR CFO color sensors are used for color recognition in the process and transmit color deviations directly to the control system.
 Compact True Color Sensor
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Inline color measurement of plastic injection-moulded parts
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In plastic injection moulding, the exact color shade of the products is important, as the color changes during cooling. To date, it has only been possible to measure random samples of cooled pieces. However, the colorCONTROL ACS inline color measurement system from Micro-Epsilon can 100% inspect the products as they are extracted from the mould.
 High Speed Photospectrometer colorCONTROL ACS7000
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Surface inspection of adhesive film
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In industry, the need for adhesive film is increasing. When producing the film, depressions and folds often occur, rendering the film unusable. Therefore, the customers’ requirements for an impeccable surface are increasing. For this purpose, a scanCONTROL 2910-100 laser scanner can be used.
 Laser scanners for 2D/3D profile measurements
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Temperature measurement for injection mould applications
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Users of injection molding machines for plastics processing are facing increased quality requirements imposed by end-users, in particular for automotive applications. Because of this trend, the importance of inline temperature control right after extrusion as a global quality attribute is growing.
 Thermal imaging cameras for industrial temperature monitoring
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Non-contact film thickness measurement
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In film production inline thickness measurement guarantees constant product quality. Micro-Epsilon's KS5 combination sensor measures the thickness of films in a non-contact and thus wear free process.
 One-sided thickness measurement of plastics
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Thickness measurement using displacement sensors
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Thickness measurement using displacement sensors is a wide application area. Basically there are distinctions between non-destructive/destructive, non-contact/with contact and one-side/two-sided thickness measurement. The Micro-Epsilon measuring techniques for thickness measurement are all emission-free whereby no emissions regulations of any kind have to be complied with. Thickness measurements must be performed both with contacting as well as with non-contact sensors whereby non-contact measuring techniques show advantages as regards accuracy and measuring speed. There is also a distinction between one-sided and two-sided thickness measurement. Two-sided thickness measurements are carried out with at least one pair of sensors which are installed together on one axis. This pair of sensors measures the target synchronously. The difference between the measurement results (C-A-B) produces the thickness of the measuring object. One-sided thickness measurements must only be performed with non-contact sensors. In doing so, the target is only measured with one sensor and either only a part of the target thickness (e.g. layer thickness) or the complete measuring object thickness is measured. Thickness measurements are mainly used in process control and quality assurance, e.g. for the control of extrusion systems or 100% checking of tube diameters.
 Capacitive displacement sensors and measurement systems
 Inductive sensors (eddy current) for displacement, distance & position
 optoNCDT Laser Sensoren
 Inspection systems for inline quality control
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Blown film thickness
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The thickness of blown films is an important aspect in terms of constant quality in blown film production. During production, strong thickness tolerances can occur. The blown film system from Micro-Epsilon measures the profile of the film with or without contact directly after the extrusion nozzle. Located on a reversing frame, the system continuously traverses the film tube and provides the data to the host system for controlling the extrusion nozzle.
 Thickness profile measurement of blown films (non-contact and contact measurement 10µm to 500µm)
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Paint inspection
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The monitoring of painted objects is becoming increasingly important in the context of high quality requirements. Defect detection directly after the painting process as well as color measurement and color comparison at the incoming goods inspection are frequent measuring tasks, where high precision and repeatability are required. |
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Fully automatic paint defect inspection of car bodies and attachments
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Particularly with shiny surfaces, a faultless production chain is expected in order to lend a sophisticated visual appearance to the final product. For fully automatic defect detection on car bodies and attachments, the reflectCONTROL inspection system is used. The system projects a striped pattern onto the surface. Deviations caused by defect are recorded with two cameras and evaluated via software.
 Fully automatic surface inspection of painted car bodies
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Color recognition of kitchen fronts
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In order to ensure consistent color of different front panels, color sensors from Micro-Epsilon are used. The sensors inspect the color of the kitchen fronts in the painting plant. Color sensors ensure that the color shade is within the specified tolerances. Even the smallest color deviations imperceptible to the human eye can be detected reliably.
 Compact True Color Sensor
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Color inspection and sorting of supplier parts
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Before installing front aprons, Micro-Epsilon color sensors check if the color of the attachment matches the body color. Different color groups can be defined to cover all coatings.
 Compact True Color Sensor
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Color measurement of liquid paint
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Mobile machines & lifting technology
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In lifting technology as well as in mobile machines, the monitoring of the movement or position is required for functional and safety aspects. Micro-Epsilon sensors are used in numerous measurement tasks to ensure a controlled sequence of movement. |
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Reduced risk of tipping with loading wagons
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In order to increase the safety of loading wagons, automatic braking systems are used. The brakes are activated if the lateral acceleration of a loading wagon becomes too high due to high speeds and tight curves and if the wagon threatens to tip over. The braking reduces the wagon’s speed and therefore both the lateral acceleration and the risk of tipping over. For electronic braking systems, acceleration sensors from the ACC53 series from Micro-Epsilon are used, which reliably detect the accelerations of the loading wagon.
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Gap analysis in axial piston pumps
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So far, gap measurements inside the pumps were not possible because of the extreme requirements. The sensors must be resistant to high speeds, high pressures up to 1,000 bar and temperatures above 100 °C. Furthermore, the pumps are extremely compact, which significantly limits the space available for integration of sensors. Thanks to the extremely small sensor designs and their high pressure and temperature stability, the eddyNCDT inductive miniature sensors are ideal for this application. The eddyNCDT 3300 eddy current measuring system, which is one of the most powerful systems in the world, is therefore used on the test rig for evaluating the pumps.
 eddyNCDT 3300
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Monitoring free-standing structures
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High, free-standing structures such as cranes are monitored using inclination sensors which provide early warnings of a possible tip over in order to avoid accidents.
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Wear measurement in the bearing
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In modern marine diesel engines, the crankshaft bearing is subject to regular maintenance intervals. For predictive maintenance, inductive sensors (eddy current sensors) are used to permanently monitor the bearing wear. Despite harsh ambient conditions such as high temperatures, lubricants and pressures, the sensors measure the bearing movement reliably in long-term use.
 Inductive sensors (eddy current) for displacement, distance & position
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Piston position in the hydraulic cylinder
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In modern hydraulic cylinders, the piston position is detected continuously. Therefore, inductive long-stroke sensors from Micro-Epsilon are used which are directly integrated in the hydraulic cylinder. Its robust design enables the sensor to provide stable measurement values despite pressure and oil.
 induSENSOR EDS
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Position detection of the piston in the hydraulic cylinder
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In order to detect the piston position of hydraulic cylinders, magnetostrictive and inductive sensors are directly integrated in the sensor. Therefore, the magneto-inductive sensor mainSENSOR is an alternative. The face-mounted magnet transfers its magnetic field to the piston rod. The sensor mounted outside then detects the magnetic field distribution along the rod and converts this into a linear output signal, which corresponds to the piston position.
 Magneto-inductive distance sensors
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Collision detection in mowers
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In agricultural machines, acceleration sensors monitor the mower in order to recognize collisions. When colliding with a stone, the mower will experience a movement that is detected by the acceleration sensors. When the mower is immediately switched off, damages can be reduced or avoided.
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Jib lengths of mobile cranes
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The current jib length is important when calculating the torque of the load on the crane. This length is measured with an integrated draw-wire sensor. This simple and telescopic measuring principle makes wire sensors predestined for the task. The sensors can also be retrofitted.
 Draw-wire displacement sensors
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Precision synchronized lifting system
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Synchronized lifting systems enable the raising and lowering of heavy loads controlled for distance and force or the controlled forward feed of large components. To achieve this, eight or more cylinders are connected to a central high pressure hydraulic system (700 bar). The travel displacement of each individual cylinder must be measured as the actual value for the synchronized movement and supplied to the closed/open loop controller. Draw-wire displacement sensors of the wireSENSOR Series P60 are employed for this task.
 WDS-P60 analog
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Displacement measurement on slag transporter
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Draw-wire sensors are used to reduce the standstill time of slag transporters during the loading and unloading. They are installed on the tipping cylinder and the support cylinder. In this way, the signal of a limit switch no longer has to be waited for. Depending on the load state, the transporter can start the journey earlier. The sensor also withstands this demanding environment using a special case and wire extensions.
 Draw-wire displacement sensors
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Lift height of a catering vehicle
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Catering vehicles play an important role in passenger air traffic. They are responsible for there being enough foodstuffs on board. It is especially difficult with the Airbus A380 to reach the loading hatch with the vehicle. Therefore, the load area of the scissor platform is also maneuverable. Draw-wire sensors are perfectly suitable for measuring this displacement.
 Draw-wire displacement sensors
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Rack control unit - lift height
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The frequently used automatic rack control units make modern warehousing much easier. These units must automatically travel long distances and position the products with millimetre precision at the end. Modern optical laser sensors and also draw-wire sensors are used to monitor this movement. Draw-wire sensors are the more economical solution for distances up to 50 metres. Laser sensors which determine the distance using time of flight measurement are suitable for larger distances. Distances can be precisely measured and loads can be exactly positioned or delivered with their help.
 Laser distance sensors for extra long ranges
 Draw-wire displacement sensors
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Crane support distance
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A truck-mounted crane is frequently the better solution in many cases where loads have to be lifted. As a mobile solution, safety also plays an important role here. Therefore a load torque limiter controls whether the crane can still lift or not. In order to ensure the maximum permitted load, the side crane supports must always be completely extended. If this would not be possible due to lack of space, the crane could not be put into operation. The dynamic process for measuring how far the crane supports have been extended facilitates a calculation of the permitted load capacity. Thus, the use of truck-mounted cranes can also be ensured where space is restricted..
 Draw-wire displacement sensors
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Lift platform – lift height
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Side supports against tipping over are installed for lift trucks and lift work platforms. The crane or the platform can only be put into operation when the supports are completely extended so that there is also no danger of tipping in the case of long extension frames. However, sometimes this is not possible for spatial reasons. Therefore draw-wire sensors from Micro-Epsilon are used for measuring how far the supports are extended. A dynamic load torque limit across the actual support area is thus produced. Redundant measurement is performed as this is a safety relevant measured value.
 Draw-wire displacement sensors
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Synchronized lifting system lift height
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Mobile lifting jacks are being used more and more often for commercial and railed vehicles. The lifting jacks for commercial vehicles are often designed as column lifts. In contrast, railed vehicles are often lifted on the frame. Any number of these lifting jacks can be combined into one system. As each lifting jack has its own drive for the lifting movement, the individual devices must be synchronized in order to ensure a completely level and oscillation-free movement. The lifting movement of each lifting jack is measured with a draw-wire sensor for this.
 Draw-wire displacement sensors
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Forklift lifting height
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A large part of internal transportation is performed by forklifts. The risk of tipping the forklift when products are lifted is high. Therefore, the permitted speed has been restricted with limit switches. Draw-wire sensors from Micro-Epsilon measure the current lift height and make continuous speed regulation possible, depending on the height of the products.
 Draw-wire displacement sensors
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