Compact confocal chromatic sensors for precise displacement and thickness measurement

    Measuring ranges Resolution Linearity
IFS2406.jpg (2 KB)) Compact confocal chromatic sensors for precise displacement and thickness measurement 2.5 - 10 mm 0.001 % F.S.O. ± 0.03 % F.S.O.
FSO = of full scale output
 

Details

Measuring ranges (mm):
2.5|10
Linearity max. 0.75µm
Resolution max. 0.024µm
Distance and one-sided thickness measurement
Small light spot
Vacuum compatible sensor
 
 

 

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